• Title of article

    Microhardness of thin molybdenum films

  • Author/Authors

    Navr?til، نويسنده , , Vladislav and ?ikola، نويسنده , , Tom??، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 1997
  • Pages
    3
  • From page
    390
  • To page
    392
  • Abstract
    The microhardness of thin molybdenum films deposited on monocrystalline Si substrates was measured using a simple method of the extrapolation to a very thick layer. The results obtained give a relatively high value for the film hardness. We attempt to explain this by structural changes which occur in the course of the complicated growth of the films.
  • Keywords
    Thin films , mechanical properties , Microhardness
  • Journal title
    MATERIALS SCIENCE & ENGINEERING: A
  • Serial Year
    1997
  • Journal title
    MATERIALS SCIENCE & ENGINEERING: A
  • Record number

    2133079

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=2133079