Title of article
Influence of different growth parameters and related conditions on 6H-SiC crystals grown by the modified Lely method
Author/Authors
Rost، نويسنده , , H.-J and Siche، نويسنده , , D and Dolle، نويسنده , , Eiserbeck، نويسنده , , W and Müller، نويسنده , , T and Schulz، نويسنده , , D and Wagner، نويسنده , , G and Wollweber، نويسنده , , J، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1999
Pages
5
From page
68
To page
72
Abstract
6H-SiC-crystals have been grown using the modified Lely method. The growth rate was investigated for dependence on the growth time, the source composition and the system pressure. It was shown that the growth rate is strongly influenced by the deviation from the stoichiometry and the system pressure. The influence of the composition of the vapour phase is dominant compared with the system pressure in the first stages of the growth process. The average growth rate decreases with increasing growth duration.
Keywords
Modified LELY method , 6H-SiC , Crystal growth
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Serial Year
1999
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Record number
2134059
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