The effect of carbon mesh on the electric property of α-carbon films

The solid state amorphous carbon films have been deposited by the method of plasma enhanced chemical vapor deposition (PECVD). The structural features have been characterized using FT-IR spectroscopy, Raman scattering, and I–V measurement. The film is considered to be composed of microcrystalline diamond domains and graphite-like carbon domains, which are interconnected by hydrogenated sp3 tetrahedral carbons. In I–V measurement, the sudden increase of current at a certain critical voltage has been observed and this phenomenon is understood to be due to the effect of charge tunneling through carbon mesh between graphite-like domains.