Title of article
Assessment of carbon concentrations in polycrystalline and monocrystalline gallium arsenide using SSMS, FTIR, and CPAA
Author/Authors
Wiedemann، نويسنده , , B. and Alt?n?z، نويسنده , , H.Ch. and Bethge، نويسنده , , K. and Meyer، نويسنده , , J.D. and Michelmann، نويسنده , , R.W.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1999
Pages
5
From page
118
To page
122
Abstract
For the assessment of C concentration [C] in GaAs with SSMS, FTIR, and CPAA new results are presented. Using a SSMS relative sensitivity coefficient RSC=[C]SSMS/[C]CPAA=3.1±0.1 an improved FTIR calibration factor f=[C]/(integrated absorption)=(7.1±0.2)×1015 cm−1 for the infrared absorption due to the local vibrational mode of C on As sites in the GaAs lattice (582 cm−1) at 77 K has been derived.
Keywords
Spark source mass spectrometry , Fourier transform infrared absorption spectroscopy , Charged particle activation analysis , carbon , Gallium arsenide
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Serial Year
1999
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Record number
2134593
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