Title of article
Progress towards achieving integrated circuit functionality using porous silicon optoelectronic components
Author/Authors
Benson، نويسنده , , T.M and Arrand، نويسنده , , H.F and Sewell، نويسنده , , P and Niemeyer، نويسنده , , D and Loni، نويسنده , , A and Bozeat، نويسنده , , R.J and Krüger، نويسنده , , M and Arens-Fischer، نويسنده , , R and Thِnissen، نويسنده , , M and Lüth، نويسنده , , H، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2000
Pages
8
From page
92
To page
99
Abstract
Porous silicon offers many potential advantages for the realisation of optoelectronic circuits and systems. This paper assesses some of the technologies available for the fabrication of porous silicon waveguides for visible and infrared applications. The unique physical and chemical properties of the material enable additional functionality over other silicon-based optoelectronic technologies. As an example, optical sensing of solvents and vapours is discussed using both optical waveguides and multi-layer reflector stacks.
Keywords
Porous silicon , Optical waveguides , Multi-layer reflectors , Optical losses , Sensors
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Serial Year
2000
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Record number
2134830
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