Structure and luminescence properties of individual and multi-layer thin-film systems based on oxide phosphors

Spectra and diffraction patterns of multi-layer thin-film phosphors Zn2SiO4:Mn, ZnGa2O4:Cr, ZnGa2O4:Mn, Y2SiO5:Ce, Y2O3:Eu, and ZnO:Zn grown by ion-plasma deposition and post thermal annealing are presented in this work. Influence of indium–tin oxide (ITO) and ZnO interlayers on these properties is investigated. Texture axis, texture parameter, and crystallite size (D) of thin films were determined by using X-ray diffraction (XRD) measurements. Methods of creation of thin films with different nano/microstructure were investigated. Two-layer systems Y2O3:Eu/Y2SiO5:Ce, Y2O3:Eu/Zn2SiO4:Mn, Y2SiO5:Ce/Zn2SiO4:Mn, and ZnGa2O4–Cr/ZnO were developed. Multi-layer three-color triads were manufactured based on Y2O3:Eu (red), Zn2SiO4:Mn (green) and Y2SiO5:Ce (blue) thin-film phosphors.