Title of article :
Optical absorption of precipitated oxygen in silicon at liquid helium temperature
Author/Authors :
Sassella، نويسنده , , A and Borghesi، نويسنده , , A. and Borionetti، نويسنده , , A and Geranzani، نويسنده , , P، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2000
Pages :
6
From page :
224
To page :
229
Abstract :
Optical absorption measurements are reported, carried out in the medium infrared range at liquid helium temperature on silicon wafers after different thermal treatments for oxygen precipitation. The low temperature spectra show a complex band structure where the contributions related to precipitates with different shapes can be distinguished and, in some cases, quantified on the basis of the results of an effective medium model.
Keywords :
infrared spectroscopy , Silicon , oxygen precipitation , low temperature
Journal title :
MATERIALS SCIENCE & ENGINEERING: B
Serial Year :
2000
Journal title :
MATERIALS SCIENCE & ENGINEERING: B
Record number :
2135307
Link To Document :
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