Title of article
Grazing-incidence SAXS/WAXD on nanosized TiO2 films obtained by ALE
Author/Authors
Turkovi?، نويسنده , , A، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2000
Pages
7
From page
85
To page
91
Abstract
Titanium dioxide films on glass substrate were obtained by the atomic layer epitaxy (ALE) method. The average grain radius 〈R〉, obtained by grazing-incidence small-angle X-ray scattering (GISAXS), was 13.6±2.3 nm. The average grain size 〈R〉 of 14.1±2.1 nm obtained by grazing-incidence wide-angle X-ray diffraction (GIWAXD) agrees with GISAXS values. The fractal nature of these samples is analyzed.
Keywords
Titanium dioxide , Grazing-incidence wide-angle X-ray diffraction , Grazing-incidence small-angle X-ray scattering , Atomic layer epitaxy
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Serial Year
2000
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Record number
2135532
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