Grazing-incidence SAXS/WAXD on nanosized TiO2 films obtained by ALE

Titanium dioxide films on glass substrate were obtained by the atomic layer epitaxy (ALE) method. The average grain radius 〈R〉, obtained by grazing-incidence small-angle X-ray scattering (GISAXS), was 13.6±2.3 nm. The average grain size 〈R〉 of 14.1±2.1 nm obtained by grazing-incidence wide-angle X-ray diffraction (GIWAXD) agrees with GISAXS values. The fractal nature of these samples is analyzed.