Title of article :
Growth of GaN on Si substrates using BP thin layer as a buffer
Author/Authors :
Nishimura، نويسنده , , Suzuka and Terashima، نويسنده , , Kazutaka، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2000
Pages :
3
From page :
207
To page :
209
Abstract :
BP epitaxial layer has been successfully grown on silicon(100) substrates with a dimension of 10×10 mm2. The layer obtained is markedly flat and continuous. The thickness was 4.56 μm during 2 h growth process. To elucidate the possibility to grow a zinc blende GaN layer on BP, epitaxial growth of GaN has been carried out. A 100% cubic GaN was successfully obtained.
Keywords :
Cubic gallium nitride , X-ray diffraction , Boron monophosphide , Silicon substrates
Journal title :
MATERIALS SCIENCE & ENGINEERING: B
Serial Year :
2000
Journal title :
MATERIALS SCIENCE & ENGINEERING: B
Record number :
2135582
Link To Document :
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