Thermal decomposition of InP surfaces: volatile component loss, morphological changes, and pattern formation

The thermal decomposition of bulk and heteroepitaxial InP surfaces is studied by in-situ scanning electron microscopy combined with mass spectrometry and atomic force microscopy. Correlation is established between the evaporation of phosphorous and the formation of thermal etch pits. The formation of the pattern that the In droplets constitute is analysed using fractal mathematics. Only negligible roughening is induced by annealing outside the pits.