Title of article
Makyoh topography for the morphological study of compound semiconductor wafers and structures
Author/Authors
Riesz، نويسنده , , Ferenc، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2001
Pages
4
From page
220
To page
223
Abstract
The application of Makyoh topography in the assessment of flatness and overall curvature of semiconductor wafers and layer structures is reviewed, with special emphasis on compound semiconductors. Application examples are shown as well.
Keywords
Surface flatness , Compound semiconductors , Makyoh topography , Curvature measurement
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Serial Year
2001
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Record number
2136584
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