Title of article :
Makyoh topography for the morphological study of compound semiconductor wafers and structures
Author/Authors :
Riesz، نويسنده , , Ferenc، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2001
Abstract :
The application of Makyoh topography in the assessment of flatness and overall curvature of semiconductor wafers and layer structures is reviewed, with special emphasis on compound semiconductors. Application examples are shown as well.
Keywords :
Surface flatness , Compound semiconductors , Makyoh topography , Curvature measurement
Journal title :
MATERIALS SCIENCE & ENGINEERING: B
Journal title :
MATERIALS SCIENCE & ENGINEERING: B
