Title of article
Investigation of beryllium implanted P-type GaN
Author/Authors
Yu، نويسنده , , Chang-Chin and Chu، نويسنده , , C.F. and Tsai، نويسنده , , J.Y and Wang، نويسنده , , S.C، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2001
Pages
3
From page
82
To page
84
Abstract
We report the preliminary results of beryllium implanted into P-type GaN and the effects on the characteristic of Mg-doped P-GaN. These samples were implanted with Be ions were implanted with two different energies of 50 and 150 keV at two different doses of ∼1013 and 1014 cm−2 at room temperature. Surface morphology and photoluminescence measurements are presented.
Keywords
GaN , Photoluminescence , Implant , Beryllium
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Serial Year
2001
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Record number
2137018
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