RF magnetron sputtered high-k barium strontium titanate thin films on magnetoresistive La0.7Ca0.3MnO3 electrode

BaxSr1−xTiO3 (BST) thin films have been deposited by rf magnetron sputtering on multi-layered perovskite conducting bottom electrode with or without a buffer layer on Si. The crystallinity and surface morphology of the deposited films have been studied using X-ray diffraction and scanning electron microscopy. Electrical properties of the BST films have been evaluated on multilayer oxide electrode using Si/MgAl2O4/LCMO/BST/Al metal-insulator-metal structure. The bottom electrode interface has shown a marked effect on the electrical properties of the BST films. Current–voltage behavior has indicated the Poole–Frenkel conduction mechanism at higher voltages.