• Title of article

    Measurement of the infrared absorbance of nitrogen in CZ silicon

  • Author/Authors

    Matsumoto، نويسنده , , T and Yamanaka، نويسنده , , Y and Harada، نويسنده , , H and Inoue، نويسنده , , N، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2002
  • Pages
    4
  • From page
    144
  • To page
    147
  • Abstract
    Measurement of nitrogen concentration in CZ silicon crystals by infrared absorption spectrometry is examined. Detailed measurement conditions are established. Summing up of three absorption peaks related to nitrogen and nitrogenoxygen complex instead of measuring nitrogen peak only is found to give closer estimate of total nitrogen concentration.
  • Keywords
    Infrared absorption , Silicon , Nitrogen
  • Journal title
    MATERIALS SCIENCE & ENGINEERING: B
  • Serial Year
    2002
  • Journal title
    MATERIALS SCIENCE & ENGINEERING: B
  • Record number

    2138098

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=2138098