Multi-electrode LBIC method for characterization of 1D ‘hidden’ defects

The potentialities of a three-electrode light beam induced current (LBIC) method for the characterization of individual 1D defects located under the surface are evaluated. Using the computer simulation it is demonstrated that the considered method offers advantages over the ‘standard’ electron beam induced current (EBIC) as well as over the multi-electrode EBIC methods for the defects investigated. For the computer simulation of LBIC and EBIC signals the drift-diffusion approach is applied. The mathematical model is solved by a numerical method based on a combination of adaptive composite grids and an iterative domain decomposition algorithm.