Title of article
Work function change on O-plasma treated indium–tin-oxide
Author/Authors
Kim، نويسنده , , G.Y. and Oh، نويسنده , , J.S. and Choi، نويسنده , , E.H. and Cho، نويسنده , , G.S. and Kang، نويسنده , , S.O. and Cho، نويسنده , , J.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
5
From page
275
To page
279
Abstract
The change in work function was studied on Indium–tin-oxide (ITO) surface after O-plasma treatment using γ-focused ion beam (γ-FIB). As the surface of ITO experienced more O-plasma treatment, both the surface resistivity and the work function got higher. Auger electron spectroscopy identified the increase of oxygen as well as the decrease of Sn. The rise of work function and surface resistivity is considered to be due to the change in oxygen and Sn on the surface of ITO.
Keywords
Indium–tin-oxide , O-Plasma , Auger electron spectroscopy , ?-Focused ion beam , Work function
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Serial Year
2003
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Record number
2139101
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