The resonance vibration properties of a bimorph flexural piezoelectric ultrasonic transducer for distance measurement

In this paper, a bimorph flexural piezoelectric ultrasonic transducer (PUT) with improved design principles for distance measurement was discussed. The profiles of vibration modes of PUT have been measured by laser Doppler interferometry and compared with finite element analysis (FEA) results. The results show the measurement modes and FEA calculated ones are well matched. The combination and comparison between FEA and advanced measurement tools have provided much help to the design and fabrication of PUT.