Preparation and characteristic of the thermistor materials in the thick-film integrated temperature–humidity sensor

The designing, preparation, and characteristic of the thermistor materials in a thick-film integrated temperature–humidity sensor were investigated in detail. This article presented the relationship between resistance–temperature characteristics and the composition of the negative temperature coefficient thermistor materials, which matched with humidity sensitive material in the integrated sensor. The effects of the fabrication processing on the R–T characteristic and the material granularity, granularity uniformity were presented. Finally this article provided some experimental data of the thermistor materials and the characteristic curves of the thick-film integrated temperature–humidity sensor prepared from the material.