Low temperature growth of epitaxial complex oxide films by an excimer laser MOD process

Epitaxial La0.7Sr0.3MnO3 (LSMO) and Pb(ZrTi)O3 (PZT) thin films on various substrates were prepared by excimer laser metal organic deposition (ELMOD) process. The effect of the substrate on the formation of these films was investigated by X-ray diffraction (XRD: theta-2theta scans, pole-figure analysis). For the LSMO films, epitaxial grown LSMO films on SrTiO3 (STO) and LaAlO3 (LAO) substrates were formed by ArF laser irradiation at 400 and 500 °C, respectively. The temperature dependence of the resistance (R/R300) of the LSMO film on LAO substrate prepared at 500 °C showed a metallic behavior from 310 to 100 K, and the maximum TCR of the LSMO film on LAO was 2.5%. For the PZT films, epitaxial grown PZT films on the STO and La-doped STO (LSTO) substrates were obtained by the ELMOD process without heat treatment. The formation mechanisms of the epitaxial complex oxide films using the ELMOD process are also discussed.