Title of article :
Fabrication of nanoscale Ti honeycombs by focused ion beam
Author/Authors :
Hosokawa، نويسنده , , H and Shimojima، نويسنده , , K and Chino، نويسنده , , Y and Yamada، نويسنده , , Y and Wen، نويسنده , , C.E and Mabuchi، نويسنده , , M، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2003
Abstract :
Ti honeycombs with the side of 800 and 400 nm were fabricated by focused ion beam (FIB), though the surfaces of the bottom and wall of the Ti honeycombs were rough, as compared with the surfaces of the bottom and wall of the Si honeycomb. It is demonstrated that the nanoscale Ti components can be fabricated in a short time by FIB.
Keywords :
Ti honeycombs , Focused ion beam , Nanoscale Ti
Journal title :
MATERIALS SCIENCE & ENGINEERING: A
Journal title :
MATERIALS SCIENCE & ENGINEERING: A
