Fabrication and characterization of humidity sensor based on (Li2MoO4)x(CaMoO4)1−x system

The characteristics of a humidity sensor using a water-soluble and a single crystal material with composition (Li2MoO4)x(CaMoO4)1−x, where x is 0.8–0.9 have been studied in detail. The fabrication technology has been developed for a low humidity sensor. The specific procedures with the use of polystyrol and teflon combination as protective layer have been developed for technological sensors by microelectronics techniques. The logarithm of the sensor conductance log σ is linear decreasing function of ratio log2(Cs/C), where Cs is the concentration of saturated water vapours and C is the concentration of water vapours to be detected up to 8000 ppm.