Title of article
Improvement of the uniformity in electronic properties of AZO films using an rf magnetron sputtering with a mesh grid electrode
Author/Authors
Yasui، نويسنده , , Kanji and Asano، نويسنده , , Akira and Otsuji، نويسنده , , Miku and Katagiri، نويسنده , , Hironori and Masuda، نويسنده , , Atsushi and Nishiyama، نويسنده , , Hiroshi and Inoue، نويسنده , , Yasunobu and Takata، نويسنده , , Masasuke and Akahane، نويسنده , , Tadashi، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2008
Pages
4
From page
26
To page
29
Abstract
We have investigated the deposition of Al-doped ZnO (AZO) films using a radio frequency (rf) magnetron sputtering apparatus with a mesh grid electrode. The improvement of the uniformity of crystallinity was achieved by the effect of the appropriate negative grid biases that suppress the impingement of charged particles onto the films surface. The uniformity of the electronic properties such as resistivity, carrier concentration and Hall mobility was also improved.
Keywords
Zinc oxide , Thin films
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Serial Year
2008
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Record number
2145675
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