Correlation between thickness and optical properties of thin diamond-like carbon films deposited with RF PACVD method

The paper discusses optical properties and thickness of the diamond-like carbon (DLC) films deposited with Radio Frequency Plasma Assisted Chemical Vapour Deposition (RF PACVD) method onto 〈1 1 1〉 oriented silicon substrates. Measurements performed with spectroscopic ellipsometer indicated a significant influence of both self-bias voltage and deposition time on thickness and refractive index of the DLC films. It was also found that optical properties are strongly deposition time dependent. Determination of DLC film thickness with constant optical properties cannot be realized just by adjusting deposition time.