Title of article
Investigation of buried quantum dots using grazing incidence X-ray diffraction
Author/Authors
Schroth، نويسنده , , P. and Slobodskyy، نويسنده , , T. and Grigoriev، نويسنده , , D. and Minkevich، نويسنده , , A. and Riotte، نويسنده , , M. and Lazarev، نويسنده , , S. and Fohtung، نويسنده , , E. and Hu، نويسنده , , D.Z. and Schaadt، نويسنده , , D.M. and Baumbach، نويسنده , , T.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2012
Pages
4
From page
721
To page
724
Abstract
Self-organized, buried InAs quantum dots covered by an AlAs diffusion barrier were investigated under UHV conditions using grazing incidence X-ray diffraction. The experimental data is compared to the simulated results obtained by Finite Element Method and Distorted Wave Born Approximation. We have found that the simulated data could be compared to the experimental one only after convolution by the resolution element which can be estimated from the experiment. By adjusting the simulation parameters we were able to find good agreement between the simulated and the measured data.
Keywords
Annealing , Molecular Beam Epitaxy , Grazing incidence X-ray diffraction , Self-organized quantum dots
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Serial Year
2012
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Record number
2150302
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