Effects of plasma parameters on increasing the purity of nitrogen atom encapsulated fullerene in an RF plasma

Relatively high purity of nitrogen atom encapsulated fullerene (N@C60) has been synthesized by an electron beam superimposed radio frequency (RF) discharge plasma method. Nitrogen species are characterized by an optical emission spectroscopy (OES); and a relationship between optical emission spectra and the purity of N@C60 has been examined. It is observed that the increased amount of nitrogen molecule ions impinging on the sublimated fullerenes enhance the synthesis of N@C60. Here, it is cleared that the efficient synthesis of N@C60 is possible by controlling the parameters of electron beam superimposed RF plasma. As a consequence, comparatively high purity of about 0.08% of N@C60 has been obtained.