Author/Authors :
Luka، نويسنده , , G. and Witkowski، نويسنده , , B.S. and Wachnicki، نويسنده , , L. and Jakiela، نويسنده , , R. and Virt، نويسنده , , I.S. and Andrzejczuk، نويسنده , , M. and Lewandowska، نويسنده , , M. and Godlewski، نويسنده , , M.، نويسنده ,
Abstract :
Aluminum-doped zinc oxide (AZO) films were grown on polyethylene terephthalate (PET) substrates by atomic layer deposition (ALD) at low deposition temperatures (110–140 °C). The films have low resistivities, ∼10−3 Ω cm, and high transparency (∼90%) in the visible range. Bending tests indicated a critical bending radius of ≈1.2 cm, below which the resistivity changes became irreversible. The films deposited on PET with additional buffer layer are more stable upon bending and temperature changes.
