Guide to references on III–V semiconductor chemical etching

The literature on chemical etching of III–V semiconductors is reviewed with the intent to organize citations in categories useful to device and materials investigators. Descriptive citations are grouped by the intended etch application and subgrouped by specific semiconductors for both wet and dry etching. A separate section groups citations by the various chemical compositions used as etchants so that a broad view of results and issues can be accessed. The final section lists references by author, with complete titles and notes of their relevance to etching.