Microstructured polymer tips for scanning near-field optical microscopy

A new technique for producing polymeric cantilevers with integrated tips for combined scanning-force microscopy/scanning near-field optical microscopy is described in this paper. By integration reactive ion etched polymeric and fluorescent tips to polymer-based cantilevers, it will become possible to produce apertureless sensors for a scanning near-field optical microscope with the well-known atomic-force distance control.