Title of article :
Patterned diamond microcolumns for field emitter
Author/Authors :
Cho، نويسنده , , Hunsuk and Baik، نويسنده , , Young-Joon and Jeon، نويسنده , , D، نويسنده ,
Issue Information :
دوماهنامه با شماره پیاپی سال 1998
Abstract :
We have fabricated an array of diamond microcolumns on a silicon substrate using the following process: Fine diamond crystallites were mixed in acetone and seeded on a silicon wafer using an ultrasonic shaker. A silicon oxide film was deposited on the silicon substrate, and an array of holes was formed in the oxide film by back-etching until the diamond-seeded substrate was exposed. Diamond was grown using chemical vapor deposition. Diamond grains grew from the diamond-seeded substrate and filled the holes in the oxide layer, resulting in the formation of an array of diamond microcolumns.
Keywords :
Diamond film , Field emitter
Journal title :
Ultramicroscopy
Journal title :
Ultramicroscopy