Title of article :
Field ion specimen preparation from near-surface regions
Author/Authors :
Larson، نويسنده , , D.J. and Miller، نويسنده , , M.K. and Ulfig، نويسنده , , R.M and Matyi، نويسنده , , R.J and Camus، نويسنده , , P.P and Kelly، نويسنده , , T.F، نويسنده ,
Issue Information :
دوماهنامه با شماره پیاپی سال 1998
Pages :
6
From page :
273
To page :
278
Abstract :
The feasibility of fabricating field ion specimens from planar surfaces by the technique of ion beam mask etching has been demonstrated. The production of an electric field at the tip apex sufficient to produce field evaporation has been accomplished by a combination of the minimization of the surface area, the increase in the tip height above the planar surface, and the minimization of the tip radius and shank angle.
Keywords :
Atom probe field ion microscopy , specimen preparation , Ion sputtering
Journal title :
Ultramicroscopy
Serial Year :
1998
Journal title :
Ultramicroscopy
Record number :
2155048
Link To Document :
بازگشت