• Title of article

    Defining the parameters of a cantilever tip AFM by reference structure

  • Author/Authors

    Bykov، نويسنده , , V.A. and Novikov، نويسنده , , Yu.A. and Rakov، نويسنده , , A.V. and Shikin، نويسنده , , S.M.، نويسنده ,

  • Issue Information
    دوماهنامه با شماره پیاپی سال 2003
  • Pages
    6
  • From page
    175
  • To page
    180
  • Abstract
    A method of measurement and control of atomic force microscope (AFM) probe parameters is offered. The AFM real cantilever parameters are defined.
  • Keywords
    Dimensional metrology , AFM , Cantilever , Tip characterization , Atomic Force Microscope
  • Journal title
    Ultramicroscopy
  • Serial Year
    2003
  • Journal title
    Ultramicroscopy
  • Record number

    2155985

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=2155985