Title of article
GaBi alloy liquid metal ion source for microelectronics research
Author/Authors
Bischoff، نويسنده , , L. and Pilz، نويسنده , , W. and Ganetsos، نويسنده , , Th. and Forbes، نويسنده , , R.G. and Akhmadaliev، نويسنده , , Ch.، نويسنده ,
Issue Information
دوماهنامه با شماره پیاپی سال 2007
Pages
4
From page
865
To page
868
Abstract
A GaBi alloy liquid metal ion source has been studied. From an analysis of the source mass spectra as a function of emission current, a mechanism is suggested for the production of single- and double-charged ions. There is good agreement with the results of Swansonʹs investigations of a pure Bi source.
Keywords
Abundance , mass spectra , GaBi alloy liquid metal ion source
Journal title
Ultramicroscopy
Serial Year
2007
Journal title
Ultramicroscopy
Record number
2156995
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