EELS signal enhancement by means of beam precession in the TEM

EELS is nowadays a most relevant characterization tool as it provides chemical and electronic information with an extraordinary spatial resolution. When a crystal is viewed in zone axis in the TEM, there is channelling of the electrons along the atom columns, which strongly reduce the EELS signal, so that it is generally advised to work slightly off the zone axis to collect EELS data, which may not always be possible or advantageous. In the present work, we demonstrate the use of precession to compensate for the reduction of EELS signal when in the zone axis.