Title of article :
Multiple-input dual-output adjustment scheme for semiconductor manufacturing processes using a dynamic dual-response approach
Author/Authors :
Shu-Kai S. Fan، نويسنده , , Yen Lin، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2007
Keywords :
Process adjustment , Run-to-run feedback control , semiconductor manufacturing , On-line qualitycontrol , Dual-response optimization
Journal title :
European Journal of Operational Research
Journal title :
European Journal of Operational Research
