Title of article
Multiple-input dual-output adjustment scheme for semiconductor manufacturing processes using a dynamic dual-response approach
Author/Authors
Shu-Kai S. Fan، نويسنده , , Yen Lin، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2007
Pages
17
From page
868
To page
884
Keywords
Process adjustment , Run-to-run feedback control , semiconductor manufacturing , On-line qualitycontrol , Dual-response optimization
Journal title
European Journal of Operational Research
Serial Year
2007
Journal title
European Journal of Operational Research
Record number
216825
Link To Document