Title of article :
Characterization of polycrystalline diamond films grown by Microwave Plasma Enhanced Chemical Vapor Deposition (MWPECVD) for UV radiation detection
Author/Authors :
Acquafredda، نويسنده , , P. and Bisceglie، نويسنده , , E. and Bottalico، نويسنده , , D. and Brescia، نويسنده , , R. and Brigida، نويسنده , , M. and Caliandro، نويسنده , , G.A. and Capitelli، نويسنده , , M. and Casamassima، نويسنده , , G. and Cassano، نويسنده , , T. and Celiberto، نويسنده , , R. and Cicala، نويسنده , , G. and Crismale، نويسنده , , V. and De Giacomo، نويسنده , , A. and De Pascale، نويسنده , , O. and Favuzzi، نويسنده , , Jeffrey C. and Ferraro، نويسنده , , G. and Fusco، نويسنده , , P. and Gargano، نويسنده , , F. and Giglietto، نويسنده , , N. and Giordano، نويسنده , , F. and Gorse، نويسنده , , C. and Laporta، نويسنده , , V. and Longo، نويسنده , , S. and Loparco، نويسنده , , F. and Marangelli، نويسنده , , B. and Mazziotta، نويسنده , , M.N. and Mirizzi، نويسنده , , N. and Muscarella، نويسنده , , M.F. and Nitti، نويسنده , , M.A. and Rainٍ، نويسنده , , A. and Romeo، نويسنده , , A. and Senesi، نويسنده , , G. and Spinelli، نويسنده , , P. P. Valentini، نويسنده , , A. and Verrone، نويسنده , , G.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2010
Pages :
2
From page :
405
To page :
406
Abstract :
Photodetectors based on polycrystalline diamond (PCD) films are of great interest to many researchers for the attractive electronic, mechanical, optical and thermal properties. PCD films are grown using the Microwave Plasma Enhanced Chemical Vapor Deposition (MWPECVD) method. First, we characterized films by means of structural and morphological analysis (Raman spectroscopy and scanning electron microscopy), then we evaporated a pattern of coplanar interdigitated Cr/Au contacts with an inter-electrode spacing of 100 μ m in order to perform the electrical characterization. We carried out measurements of dark current and impedance spectroscopy to investigate the film properties and conduction mechanisms of films and the effects of post-growth treatments. Finally we developed a charge sensing pre-amplifier to read-out the signal produced by UV photons in the detector.
Keywords :
UV sensor , Electrical properties , Polycrystalline diamond films
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
Serial Year :
2010
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
Record number :
2170727
Link To Document :
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