Title of article :
Electro-optical properties of diamond thin films as UV photodetectors
Author/Authors :
Pace، نويسنده , , E. and Galluzzi، نويسنده , , F. and Rossi، نويسنده , , M.C. and Salvatori، نويسنده , , Laura S. and Marinelli، نويسنده , , M. and Paroli، نويسنده , , P.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1997
Abstract :
Optoelectronic properties of CVD-diamond thin films grown on silicon have been investigated in order to study the applications of diamond as active material for UV and soft X-ray photodetectors. A comparison of electrical and photoelectrical properties between diamond films grown by hot filament and microwave plasma enhanced CVD techniques is reported, discussing the role of the film morphology and the device geometry.
Keywords :
CVD-diamond , UV photodetector
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
