Title of article :
Development of an optical sensor for 2D multi-point alignment
Author/Authors :
Barrière، نويسنده , , J.-Ch. and Blumenfeld، نويسنده , , H. and Bourdinaud، نويسنده , , M. and Cloué، نويسنده , , O. and Molinié، نويسنده , , F. and Schune، نويسنده , , Ph.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1997
Pages :
2
From page :
264
To page :
265
Abstract :
A new type of highly transparent (95%) 2D position sensor has been developed which allows the accurate positioning (5 μm r.m.s.) of successive elements to which each sensor is attached, transversally to a laser beam used as a reference straight line. The useful area of the sensor is about 15 × 15 mm2.
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
Serial Year :
1997
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
Record number :
2175035
Link To Document :
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