Calculations and engineering of dispersive energy analyzers for photoelectron microprobe

Bipotential (BP) electron optics elements, consisting of alternating, or reciprocally penetrated electrodes under two different potentials, which are used for creation of electrostatic fields similar to the field of Cylindrical Mirror Analyzer (CMA), as the energy analysing part of Scanning Photoelectron Microscope (SPEM), are described. Numerical analysis of different variants of CMA with BP elements was performed, the energy resolution being from 0.15% to 0.9%. The energy resolution of the simplest BP CMA, designed for AES, being of 0.3% with transmission about 10%. BP elements of energy analizators are manufactured with industrial methods - point welding through specially designed copper soldered ceramic insulators.