Title of article
Control of producing sumicron X-ray masks
Author/Authors
Greenfield، نويسنده , , D.E. and Korsakov، نويسنده , , V.S. and Mishachov، نويسنده , , V.I and Trutnev، نويسنده , , N.F.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1998
Pages
5
From page
514
To page
518
Abstract
A depth control method in etching metal films for X-ray lithography masks is developed and experimentally confirmed. Possibilities of real-time end-point detection and applicability of this technique for automatic process control are demonstrated.
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Serial Year
1998
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Record number
2177482
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