مرکز منطقه ای اطلاع رساني علوم و فناوري - Spatial defect pattern recognition on semiconductor wafers using model-based clustering and Bayesian inference

Title of article :

Spatial defect pattern recognition on semiconductor wafers using model-based clustering and Bayesian inference

Author/Authors :

Tao Yuan، نويسنده , , Way Kuo، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 2008

Pages :

From page :

228

To page :

240

Keywords :

quality control , stochastic processes , Pattern recognition , semiconductor manufacturing

Journal title :

European Journal of Operational Research

Serial Year :

2008

Journal title :

European Journal of Operational Research

Record number :

217773

Link To Document :