• Title of article

    Spatial defect pattern recognition on semiconductor wafers using model-based clustering and Bayesian inference

  • Author/Authors

    Tao Yuan، نويسنده , , Way Kuo، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2008
  • Pages
    13
  • From page
    228
  • To page
    240
  • Keywords
    quality control , stochastic processes , Pattern recognition , semiconductor manufacturing
  • Journal title
    European Journal of Operational Research
  • Serial Year
    2008
  • Journal title
    European Journal of Operational Research
  • Record number

    217773

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=217773