• Title of article

    Characteristics of ablation plasma produced by pulsed light ion beam interaction with targets and applications to materials science

  • Author/Authors

    Jiang، نويسنده , , FuKun W. and Hashimoto، نويسنده , , N. and Shinkai، نويسنده , , H. and Ohtomo، نويسنده , , K. and Yatsui، نويسنده , , K.، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 1998
  • Pages
    6
  • From page
    533
  • To page
    538
  • Abstract
    Characteristics of the ablation plasma produced by intense, pulsed light ion beams have been studied together with its applications to prepare thin films. The plasma behavior was diagnosed by high-speed photography, while the dynamic pressure of the ablation plasma by the foil acceleration studies. As an example of the applications, we present the preparation of dielectric thin films by using the technique of ion beam evaporation.
  • Keywords
    thin film deposition , Dynamic Pressure , Ablation plasma , Pulsed ion beam , Ion beam evaporation
  • Journal title
    Nuclear Instruments and Methods in Physics Research Section A
  • Serial Year
    1998
  • Journal title
    Nuclear Instruments and Methods in Physics Research Section A
  • Record number

    2179458