Title of article
Characteristics of ablation plasma produced by pulsed light ion beam interaction with targets and applications to materials science
Author/Authors
Jiang، نويسنده , , FuKun W. and Hashimoto، نويسنده , , N. and Shinkai، نويسنده , , H. and Ohtomo، نويسنده , , K. and Yatsui، نويسنده , , K.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1998
Pages
6
From page
533
To page
538
Abstract
Characteristics of the ablation plasma produced by intense, pulsed light ion beams have been studied together with its applications to prepare thin films. The plasma behavior was diagnosed by high-speed photography, while the dynamic pressure of the ablation plasma by the foil acceleration studies. As an example of the applications, we present the preparation of dielectric thin films by using the technique of ion beam evaporation.
Keywords
thin film deposition , Dynamic Pressure , Ablation plasma , Pulsed ion beam , Ion beam evaporation
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Serial Year
1998
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Record number
2179458
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