Title of article :
Characteristics of ablation plasma produced by pulsed light ion beam interaction with targets and applications to materials science
Author/Authors :
Jiang، نويسنده , , FuKun W. and Hashimoto، نويسنده , , N. and Shinkai، نويسنده , , H. and Ohtomo، نويسنده , , K. and Yatsui، نويسنده , , K.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1998
Pages :
6
From page :
533
To page :
538
Abstract :
Characteristics of the ablation plasma produced by intense, pulsed light ion beams have been studied together with its applications to prepare thin films. The plasma behavior was diagnosed by high-speed photography, while the dynamic pressure of the ablation plasma by the foil acceleration studies. As an example of the applications, we present the preparation of dielectric thin films by using the technique of ion beam evaporation.
Keywords :
thin film deposition , Dynamic Pressure , Ablation plasma , Pulsed ion beam , Ion beam evaporation
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
Serial Year :
1998
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
Record number :
2179458
Link To Document :
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