Author/Authors :
Olsen، نويسنده , , J and Kirk، نويسنده , , E.C and Thomsen، نويسنده , , K and van den Brandt، نويسنده , , B and Lerch، نويسنده , , Ph and Scandella، نويسنده , , L and Zehnder، نويسنده , , A and Mango، نويسنده , , S and Ott، نويسنده , , H.R and Huber، نويسنده , , M and Hilton، نويسنده , , G.C and Martinis، نويسنده , , J.M، نويسنده ,
Abstract :
We are developing small arrays of microcalorimeters based on transition edge sensors made with Mo/Au bilayers deposited on silicon nitride membranes and Au absorbers. The superconducting transition of the bilayers is adjusted to be around 130 mK with a transition width better than a millikelvin by use of the proximity effect between the Au and Mo films. We built a dilution refrigerator and wired it for 2 channel operation in order to study thermal coupling issues between thermometers within the array. The device fabrication procedure as well as preliminary results are presented.