Title of article
Two-channel X-ray reflectometer
Author/Authors
A.G Touryanski، نويسنده , , A.G and Vinogradov، نويسنده , , A.V and Pirshin، نويسنده , , I.V، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2000
Pages
4
From page
184
To page
187
Abstract
The two-channel X-ray reflectometer is proposed providing an increase in accuracy and sensitivity especially to nanoscale oxide layers. The reflectometer has two independent measuring channels controlled by a processor and the beam-splitting and spectral selection device based on a row of semitransparent plates of pyrolitic graphite. Results of reflection curve measurements in a relative mode are presented for an Ni film and GaAs monocrystal.
Keywords
reflection , X-rays , Oxide , surface , GaAS , Thin film , Graphite
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Serial Year
2000
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Record number
2186690
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