Title of article :
Design and construction of UVSOR-BL4A2 beam line for nano-structure processing
Author/Authors :
Takezoe، نويسنده , , N. and Yanagida، نويسنده , , H. and Tanaka، نويسنده , , T. and Kurosawa، نويسنده , , K. and Nonogaki، نويسنده , , Y. and Noda، نويسنده , , H. and Mekaru، نويسنده , , H. and Urisu، نويسنده , , T.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2001
Abstract :
We have designed and constructed a new beam line BL4A2 at UVSOR mainly for nano-structure fabrication based on synchrotron radiation stimulated surface photochemical reactions. In order to obtain high-photon flux, we use white ray beam focused with only one mirror. The beam line is connected with ultra-high vacuum scanning tunneling microscope for in-situ atomic scale observations, low energy electron diffraction and Auger electron spectroscope for surface crystal structure characterization, and photo-stimulated surface reaction chamber. In order to monitor the optical properties with atomic scale, a near field optical microscope is planned to be installed.
Keywords :
UVSOR , Nano-structure , SR stimulated process , UHV-STM
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
Journal title :
Nuclear Instruments and Methods in Physics Research Section A