Author/Authors :
Nikolay A. and Merthe، نويسنده , , Daniel J. and Goldberg، نويسنده , , Kenneth A. and Yashchuk، نويسنده , , Valeriy V. and McKinney، نويسنده , , Wayne R. and Celestre، نويسنده , , Richard and Mochi، نويسنده , , Iacopo and MacDougall، نويسنده , , James and Morrison، نويسنده , , Gregory Y. and Rekawa، نويسنده , , Senajith B. and Anderson، نويسنده , , Erik W. Smith، نويسنده , , Brian V. and Domning، نويسنده , , Edward E. and Padmore، نويسنده , , Howard، نويسنده ,
Abstract :
Broadly applicable, in situ at-wavelength metrology methods for x-ray optics are currently under development at the Advanced Light Source. We demonstrate the use of quantitative wavefront feedback from a lateral shearing interferometer for the suppression of aberrations. With the high sensitivity provided by the interferometer we were able to optimally tune the bending couples of a single elliptical mirror (NA=2.7 mrad) in order to focus a beam of soft x-rays (1.24 keV) to a nearly diffraction-limited beam waist size of 156 ( ± 10 ) nm .
Keywords :
Metrology of x-ray optics , Synchrotron radiation , Shearing interferometry , Knife-edge measurement
