Author/Authors :
Nakamori، نويسنده , , Hiroki and Matsuyama، نويسنده , , Satoshi and Imai، نويسنده , , Shota and Kimura، نويسنده , , Takashi and Sano، نويسنده , , Yasuhisa and Kohmura، نويسنده , , Yoshiki and Tamasaku، نويسنده , , Kenji and Yabashi، نويسنده , , Makina and Ishikawa، نويسنده , , Tetsuya and Yamauchi، نويسنده , , Kazuto، نويسنده ,
Abstract :
An adaptive X-ray mirror with shape controllability in a spatial wavelength range longer than 20 mm was developed, and we demonstrated its shape generation and focusing performance characteristics. The shape accuracy in a spatial wavelength range shorter than 20 mm, which cannot be adaptively figured, was controlled in advance offline. A pencil beam method for measuring the slope error and a phase retrieval method for precisely estimating the wavefront error were employed for online shape correction. A focal spot size of 120 nm, which is diffraction-limited, was realized, and the shape accuracy obtained nearly satisfied Rayleighʹs quarter-wavelength criterion.
