Title of article
Update on scribe–cleave–passivate (SCP) slim edge technology for silicon sensors: Automated processing and radiation resistance
Author/Authors
Fadeyev، نويسنده , , V. and Ely، نويسنده , , S. and Galloway، نويسنده , , Z. and Ngo، نويسنده , , J. and Parker، نويسنده , , C. and Sadrozinski، نويسنده , , H.F.-W. and Christophersen، نويسنده , , M. and Phlips، نويسنده , , B.F. and Pellegrini، نويسنده , , G. and Rafi، نويسنده , , J.M. and Quirion، نويسنده , , D. and Dalla Betta، نويسنده , , G.-F. and Boscardin، نويسنده , , M. and Casse، نويسنده , , G. and Gorelov، نويسنده , , I. and Hoeferkamp، نويسنده , , M. E. METCALFE، نويسنده , , J. and Seidel، نويسنده , , S. and Gaubas، نويسنده , , E. and Ceponis، نويسنده , , T. and Vaitkus، نويسنده , , J.V.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2014
Pages
5
From page
59
To page
63
Abstract
We pursue scribe–cleave–passivate (SCP) technology for making “slim edge” sensors. The goal is to reduce the inactive region at the periphery of the devices while maintaining their performance. In this paper we report on two aspects of the current efforts. The first one involves fabrication options for mass production. We describe the automated cleaving tests and a simplified version of SCP post-processing of n-type devices. Another aspect is the radiation resistance of the passivation. We report on the radiation tests of n- and p-type devices with protons and neutrons.
Keywords
Slim edge , Active area , scribing , Cleaving , radiation , passivation
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Serial Year
2014
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Record number
2196510
Link To Document