Fifth-order canonical geometric aberration analysis of electrostatic round lenses

In this paper the fifth-order canonical geometric aberration patterns are analyzed and a numerical example is given on the basis of the analytical expressions of fifth-order aberration coefficients derived in the present work. The fifth-order spherical aberration, astigmatism and field curvature, and distortion are similar to the third-order ones and the fifth-order coma is slightly different. Besides, there are two more aberrations which do not exist in the third-order aberration: they are peanut aberration and elliptical coma in accordance with their shapes. In the numerical example, by using a cross-check of the calculated coefficients with those computed through the differential algebraic method, it has been verified that all the expressions are correct and the computational results are reliable with high precision.