Title of article :
An improved electrostatically focused electron gun for high-temperature evaporations
Author/Authors :
Heagney، نويسنده , , Joanne M. and Heagney، نويسنده , , Joseph S.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2004
Pages :
4
From page :
235
To page :
238
Abstract :
The electrostatically focused electron gun previously reported (Nucl. Instr. and Meth. A 238 (1984) 530) has been improved by reducing the overall size and making the crucible easily replaceable. A simple, mechanical focusing mechanism has been designed and implemented, allowing focusing of the electron beam from outside the vacuum chamber. Operating characteristics and use experience for various materials are given. Further areas for development will be discussed.
Keywords :
Efficiency of evaporation , Electron beam heating
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
Serial Year :
2004
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
Record number :
2198131
Link To Document :
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