Experimental study of the kinetic inductance fraction of superconducting coplanar waveguide

We have studied the kinetic inductance fraction (ratio of kinetic inductance to total inductance) of superconducting coplanar waveguides (CPWs) by measuring the resonance frequency of CPW transmission line resonators. We describe a procedure for accurately determining the kinetic inductance of transmission line geometries with small kinetic inductance fractions. In this approach, we compare the temperature dependence of the resonance frequency with that of a resonator of the same film thickness but with a large kinetic inductance fraction. We present data for 200 nm-thick Al CPWs of several geometries and compare that with our own calculations and with calculations found in literature.